Image data fusion of SIMS and TOF-SIMS with a high spatial resolution is helpful to obtain a clearer score image by PCA. An image data fusion of SIMS and TOF-SMS in high spatial and mass resolution ...
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A focused ion beam scanning electron microscope (FIB-SEM) featuring a compact Time-of-Flight Secondary Ion Mass Spectrometer (ToF-SIMS) and a traditional microanalytical method of Energy Dispersive ...