Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and ...
Applied Materials has launched a new generation of optical semiconductor wafer inspection machines that incorporate big data and AI techniques. These multimillion-dollar machines are used in chip ...
High-speed optical circuits and sensors generally require strict control over light polarization to minimize loss and cross-talk in photonic devices such as waveguides. An A*STAR team now predicts ...
TOKYO--(BUSINESS WIRE)--OKI (TOKYO: 6703) has successfully developed Tiling crystal film bonding (CFB; Note 1) technology using its proprietary CFB technology. This technology makes possible the ...
Overlay is one of the most critical process control steps of semiconductor manufacturing technology. A typical advanced scheme includes an overlay feedback loop based on after litho optical imaging ...
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