Microelectromechanical-systems (MEMS) technology uses micro fabrication techniques to combine microelectronics capabilities with the mechanical properties of microsensors. Increasingly, MEMS ...
A MEMS microphone is a solid state integrated IC that can sense voice in the same way as an ECM Microphone [Electret Condenser Microphone]. MEMS microphones are widely adopted in modern devices such ...
Early MEMS sensors did not have built-in self-test features. Engineers were left to their own devices and had to physically tilt (in an accelerometer case) or rotate (in a gyroscope case) the Printed ...