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Brooks Automation Inc. today announced that Tokyo Electron Ltd. (TEL) of Japan has licensed key elements of its patented 300mm front opening unified pod (FOUP) Load Port technology for use in all of ...

They’re called FOUPs, for front-opening unified pods, they number in the thousands and they’re zipping around continuously overhead. No, it’s not the climactic invasion scene from Hollywood’s latest ...

SUSS MicroTec today announced the first shipments of its 300mm dual front opening unified pod (FOUP) auto loading probing system. The German company said the probe system is capable of loading and ...